The alpha step d600 stylus profiler is capable of measuring 2d and 3d step heights from a few nanometers to 1200m. The d600 includes a 200 mm motorized stage, with 150 x 178 mm xy range of motion. Dss is your source for quality refurbished and reconditioned semiconductor equipment. Back to equipment list profilometer tencor alpha step 200 fablab. The kla tencor alpha step iq stylusbased surface profiler combines high measurement precision and versatility. Wait at least 10 seconds before running the profiler software to allow the stage and computer to establish the usb connection. Klatencorprometrix refurbished systems sold metrology. Our stylus and optical profilers offer a complete range of surface metrology capabilities to meet the needs of the engineering and research communities. A sturdy reliable profilometer used for measuring film thickness, step height, and surface morphology located inside our class 100 cleanroom. The alphastep 500 is ideal for applications such as semiconductor pilot lines and materials or process.
Az nlof 2000 is a pgmea solvent based photo resist from clariant. Get an optical profilometer for less than half the price of an afm or 3d stylus profilometer. You are bidding on the following items tencor alpha step 200 surface profiler 1002000 as200 profilometer description condition. Step heights can range from 20nm to 160um, with scan lengths up to 10mm. Feb, 2020 the klatencor alphastep iq profiler measures step height, waviness and roughness of a surface. Klatencor alphastep 200 micronano fabrication center. Kla tencor alphastep 200 profilometer materials research. Tencor alphastep 500 surface profiler brumley south inc. Duis aute irure dolor in reprehenderit in voluptate velit esse cillum dolore eu fugiat nulla pariatur. The stylus profilometer system includes a 200 mm motorized stage, with 150 mm x 178 mm xy range of.
The alphastep d500 stylus profiler is capable of measuring 2d step heights from a few nanometers up to 1200m. Available upon request refurbished and calibrated with 180day warranty condition. Klatencor alpha step 500 product detail direct source. Currently stocking parts for alphastep 200, 250, 300 and 500 series surface profilers. The kla tencor alpha step iq surface profilometer is a mechanical, stylusbased step profiler offering a complete suite of 2d analysis features for surface topography analysis. Turn on the power to the profiler on the back panel. Kla tencor alphastep 200 is a 2d computerized stylusbased surface profiler that autolevels and autoscales step heights up to 160 ka in the ka mode or up to 160 m in the m mode. Tencor alphastep 200 profilometer the alphastep 200 is a 2d stylus profilometer with 5 a vertical resolution in ka mode and 5 nm resolution in micron mode. Our development series of surface profiler products is designed to match the varied requirements of our. Tencor alphastep series spare parts metrology equipment. The alphastep d100 profilometer rapidly and quantitatively measures the 2d topography of surfaces with a 30mm scan length. The tencor alphastep 200 profilometer is a stylusbased surface profiler used to measure thin film thicknesses, step heights, etch depths, and microroughness.
The xy stage is a manual stage the description says programmable. Ultimate optical sensitivity and speed for rapid defect discovery. It is more sensitive than hsq and has a very good thermal stability. Full wli and psi functionality results in uncompromised performance at prices lower than afms and stylus profilometers. Manual and automatic leveling functions are available. The klatencor development series of stylus profilers offer a complete solution focusing on the needs of the engineering and research community. The tencor p10 surface profiler is a computerized, highsensitivity surface profiler that measures roughness, waviness, and step height in a variety of applications. The klatencor alphastep iq surface profilometer is a mechanical, stylusbased step profiler offering a complete suite of 2d analysis features for surface topography analysis. Sporting a z80 processor and a delightfully retro cathode ray tube, this classic. Tencor alpha step series profilers as 200, as250, as300, as500 prometrix resistivity rs series rs35, rs35a, rs55, rs55tc, rs55tca, rs75, rs100 prometrix film measurement uv series uv1050, uv1070, uv1250, us1280se, f5x, spectra fx, spectra fx100 200 tencor high resolution profiler hrp series 100, 200, 240, 300, 340. Tencor alphastep 200 surface profiler bmi surplus, inc.
Pernollet page 1 3 epfl sti cmi alpha step 500 the alphastep 500 equipment is used to characterize a sample surface profile by scanning it with a diamond tip sensor. Klatencor launches 8900 inspection system flexible defect inspection system for cmos image sensor applications the 8900 defect inspection system expands kla tencors product portfolio in cmos image sensor process control the 8900 represents a single, flexible solution to address the wide range of defect challenges that arise during the manufacturing of an image sensors. Lorem ipsum dolor sit amet, consectetur adipiscing elit, sed do eiusmod tempor incididunt ut labore et dolore magna aliqua. The obtained plot is a representation of the scanned area crossview. List of wafer materials this tool can accept not list of all materials, just the wafer itself.
The alpha step d500 stylus profiler is capable of measuring 2d step heights from a few. Tencor alpha step 200 surface profiler 084999 tested. The d500 includes a manual 140mm stage and advanced optics with enhanced video controls. The stylus profiler features an innovative optical lever sensor technology and a 140mm manual stage. When you have roughly placed the sample under the camera, use the z stage controls to lower the stylus until you can see the stylus and sample in the video window. Note missing some small covers and a knob as shown in the picture. The new sequencing software features manual deskew alignment, allowing users. Our development series of surface profiler products is designed to match the varied requirements of our customers through the delivery of full featured. The alpha step d500 stylus profiler is capable of measuring 2d step heights from a few nanometers to 1200m. Kla tencor launches 8900 inspection system flexible defect inspection system for cmos image sensor applications the 8900 defect inspection system expands kla tencor s product portfolio in cmos image sensor process control the 8900 represents a single, flexible solution to address the wide range of defect challenges that. Alpha step d100 stylus profiler the kla tencor development series of stylus profilers offer a complete solution focusing on the needs of the engineering and research community.
Alphastep d500 stylus profiler surface profilers kla. Operation instructions for the kla tencor p6 surface. It measures the deflection of a stylus as it is drawn over the sample. Klas alphastep d500 stylus profiler is an easytouse device that has advanced high resolution 2d profiling, profile stitching, 2d stress and many additional features. Cookie information is stored in your browser and performs functions such as recognising you when you return to our website and helping our team to understand which sections of the website you find most interesting and useful.
A sturdy reliable profilometer used for measuring film thickness, step height, and surface. Please contact us for additional information and pricing. It also includes improved video controls for versatile sample visualization together with advanced. The system has the capability of manual single scans only. The kla tencor alphastep profilometer measures step heights, surface profiles and roughness using a stylus with a 12. The alphastep d100 system includes a zsensor range up to 1. The alphastep d600 stylus profiler is capable of measuring 2d and 3d step heights from a few nanometers to 1200m. Alphastep d600 stylus profiler surface profilers kla. Klas alphastep d600 stylus profiler provides users with advanced high resolution 2d and 3d profiling, profile stitching, 2d stress, and several other features in a convenient, userfriendly platform the d600 stylus profiler comprises a 200mm motorized stage, with 150mm x 178mm xy range of motion and an advanced optical lever sensor technology. Alpha step 500 user manual university of notre dame.
Adjacent markets power device candela cs920 led data storage mems candela 8720 candela 7100 wiseries general alphastep 2920 series broadband plasma patterned wafer defect inspection we wish we could resolve it just like that 2920 series 7 klatencor corp. Alphastep d600 stylus profiler offers industryleading high resolution 2d. Tencor alphastep 200 surface profiler brumley south inc. The klatencor alphastep iq profiler measures step height, waviness and roughness of a surface. The alphastep d500 stylus profiler is capable of measuring 2d step heights from a few. Pernollet page 1 3 epfl sti cmi alpha step 500 the alpha step 500 equipment is used to characterize a sample surface profile by scanning it with a diamond tip sensor. This is a for sale ad about klatencor alphastep 200 as200 alphastep step. Kla tencor alphastep 200 is a 2d computerized stylusbased surface profiler that. During our refurbishing process we will complete an inspection of the tool and replace any items that are going bad or are known to go bad in the future. The alphastep 200 is used to measure surface characteristics with high precision coatings, roughness, steps or depths vertical resolution 15 angst. The profilm3d uses stateoftheart white light interferometry wli to measure surface profiles and roughness down to 0. Kla tencor alphastep 200 the kla tencor alphastep profilometer measures step heights, surface profiles and roughness using a stylus with a 12. Tencor alphastep series profilers as200, as250, as300, as500 prometrix resistivity rs series rs35, rs35a, rs55, rs55tc, rs55tca, rs75, rs100 prometrix film measurement uv series uv1050, uv1070, uv1250, us1280se, f5x, spectra fx, spectra fx100200 tencor high resolution profiler hrp series 100, 200, 240, 300, 340. Kla tencor alpha step iq standard operating procedure version.
Back to equipment list profilometer tencor alpha step 200 fablab description the alphastep 200 is used to measure thin film thicknesses of less than 100 a up to 165 microns. Profilometers tencor alphastep 200 profilometer dektak iia profilometer. Measurement of vertical features ranging from 100 nm to approximately 2 mm. If there is something you would like us to do, please let us know and we will certainly try. Tencor alphastep 200 surface profiler salesrefurbished and fully. Alphastep birck nanotechnology center wiki confluence.
Used fair overall cosmetics minor scuff marks and scratches power up tested appears to be in working state screen can be dim at times due to the equipment age warranty. We do not have the expertise to test it after that. We have completely gone throughout the tool and replaced items that were going bad or are known to go bad in the future. Alphastep iq 2d benchtop surface profiler, hrp 350 series high resolution surface profiler provide comprehensive surface metrology analysis and surface topography control solutions to meet the needs of. Klatencor products offered by direct source surplus. Klatencor alphastep 200 as200 alphastep step surface profilometerprofiler the system was removed from service in working condition. This website uses cookies so that we can provide you with the best user experience possible. The new sequencing software features manual deskew alignment and. Tencor alphastep 200 automatic step profiler the alphastep 200 is a computerized step profiler with a manual xy stage, and a 9 video monitor which displays a magnified view of the sample and stylus during the scan, as well as scan profiles and a summary of scan data.
The profilers take measurement to the next level, starting with step height, texture and stress analysis. You are bidding on the following items tencor alphastep 200 surface profiler 1002000 as200 profilometer description condition. Kla tencor alphastep d120 stylus profiler the kla tencor development series of stylus profilers offer a complete solution focusing on the needs of the engineering and research community. Tencor alphastep 200 surface profiler salesrefurbished and fully functional to oem specifications. Klatencor alphastep 200 as200 alphastep step surface. Our development series of surface profiler products is designed to match the varied requirements of our customers through the delivery of full featured products.